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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications
Soft XRays and Extreme Ultraviolet Radiation Principles and Applications
Author: David Attwood
This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles ...  more »
ISBN-13: 9780521029971
ISBN-10: 052102997X
Publication Date: 3/5/2007
Pages: 504
Edition: 1
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Publisher: Cambridge University Press
Book Type: Paperback
Other Versions: Hardcover
Members Wishing: 1
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