Skip to main content
PBS logo
 
 

Search - Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)

Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)
Principles of Lithography Third Edition - SPIE Press Monograph, Vol. PM198
Author: Harry J. Levinson
The publication of Principles of Lithography, Third Edition just five years after the previous edition is evidence of the quickly changing and exciting nature of lithography as applied to the production of integrated circuits and other micro- and nanoscale devices. This text is intended to serve as an introduction to the science of microlith...  more »
ISBN-13: 9780819483249
ISBN-10: 0819483249
Publication Date: 1/21/2011
Pages: 526
Edition: 3
Rating:
  ?
0 stars, based on 0 rating
Publisher: SPIE Press
Book Type: Hardcover
Members Wishing: 0
Reviews: Amazon | Write a Review


Genres:


Back to the Top ↑
By using this Web site, you confirm that you have read, understood, and agreed to be bound by the Terms of Use. As an Amazon Associate we earn from qualifying purchases.
US Patent Number 7,877,315 | Copyright © 2004 - 2024 PaperBackSwap.com. All Rights Reserved.