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Modelling of Microfabrication Systems
Modelling of Microfabrication Systems
Author: R. Nassar, W. Dai
This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illust...  more »
ISBN-13: 9783540002529
ISBN-10: 3540002529
Publication Date: 8/5/2003
Pages: 350
Edition: 1
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Publisher: Springer
Book Type: Hardcover
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