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Microsensors, MEMS and Smart Devices
Microsensors MEMS and Smart Devices
Author: Julian W. Gardner, V. K. Varadan, Osama O. Awadelkarim
Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to mi...  more »
ISBN-13: 9780471861096
ISBN-10: 047186109X
Publication Date: 12/15/2001
Pages: 528
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Publisher: John Wiley Sons
Book Type: Hardcover
Members Wishing: 0
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