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Introduction to Microlithography (Acs Professional Reference Book)
Introduction to Microlithography - Acs Professional Reference Book
Author: Larry F. Thompson, C. Grant Willson
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial...  more »
ISBN-13: 9780841228481
ISBN-10: 0841228485
Publication Date: 2/10/1998
Pages: 540
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Publisher: American Chemical Society
Book Type: Hardcover
Members Wishing: 0
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