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Search - Gate Dielectrics and MOS ULSIs: Principles, Technologies and Applications (Springer Series in Electronics and Photonics)

Gate Dielectrics and MOS ULSIs: Principles, Technologies and Applications (Springer Series in Electronics and Photonics)
Gate Dielectrics and MOS ULSIs Principles Technologies and Applications - Springer Series in Electronics and Photonics
Author: Takashi Hori
Gate Dielectrics focusses on dielectric films satisfying the superior quality gate dielectric even in large-scale integration. The information presented is rather up to date with regard to nanometer-range ultrathin gate-dielectric films, which are indispensible for submicrometer ULSIs.
ISBN-13: 9783540631828
ISBN-10: 3540631828
Publication Date: 11/26/1997
Pages: 352
Edition: 1
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Publisher: Springer
Book Type: Hardcover
Other Versions: Paperback
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