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Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
Fundamentals of Microfabrication The Science of Miniaturization Second Edition
Author:
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are liter... more »
Author:
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are liter... more »
ISBN-13: 9780849308260
ISBN-10: 0849308267
Publication Date: 3/13/2002
Pages: 752
Rating: ?
ISBN-10: 0849308267
Publication Date: 3/13/2002
Pages: 752
Rating: ?
0 stars, based on 0 rating
Genres:
