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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Fundamental Principles of Optical Lithography The Science of Microfabrication
Author: Chris Mack
ISBN-13: 9780470727300
ISBN-10: 0470727306
Publication Date: 1/18/2008
Pages: 534
Edition: illustrated edition
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Publisher: Wiley
Book Type: Paperback
Other Versions: Hardcover
Members Wishing: 0
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