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Search - Field Guide to Optical Lithography (SPIE Vol. FG06) (Field Guide)

Field Guide to Optical Lithography (SPIE Vol. FG06) (Field Guide)
Field Guide to Optical Lithography - SPIE Vol. FG06 - Field Guide
Author: Chris A. Mack, Chris A. Mack
The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography co...  more »
ISBN-13: 9780819462077
ISBN-10: 0819462071
Publication Date: 1/24/2006
Pages: 136
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Publisher: SPIE Publications
Book Type: Spiral-bound
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