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Field Guide to Optical Lithography (SPIE Vol. FG06) (Field Guide)
Field Guide to Optical Lithography - SPIE Vol. FG06 - Field Guide Author:Chris A. Mack, Chris A. Mack The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography co... more »ntrol and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.« less