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CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications
CVD of Compound Semiconductors Precursor Synthesis Development and Applications
Author: Anthony C. Jones, Paul O'Brien
Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors...  more »
ISBN-13: 9783527292943
ISBN-10: 3527292942
Publication Date: 5/1/1997
Pages: 360
Edition: 1
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Publisher: Wiley-VCH
Book Type: Hardcover
Members Wishing: 0
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